OMRON releases D6F-PH thermal flow-type MEMS differential pressure sensor aimed at maximizing air-conditioning efficiency

March 21, 2013

KYOTO, Japan -- OMRON Corporation (TOKYO: 6645, ADR: OMRNY) today announced the release on March 21 of the D6F-PH MEMS differential pressure sensor1 featuring OMRON's newly-developed cutting-edge MEMS thermal flow sensor chip.

The D6F-PH is a thermal flow-type sensor meaning it is capable of measuring with superior sensitivity and reproducibility in low pressure environments and with a wider pressure range than the commonly-used capacitance-type and piezoelectric-type differential pressure sensors. Embedded ASICs carry out digital correction (linearity and temperature correction) making the D6F-PH more precise and less influenced by temperature than conventional analog output sensors.

The D6F-PH will make it possible to optimize business and household air conditioning and ventilation control in order to maximize energy efficiency, and also increase the accuracy of gas flow control and monitoring in digital medical equipment such as anesthetic machines and respirators.

1 How differential pressure sensors measure flow rates
A constriction is created in a flow channel inside the sensor which causes an overall drop in pressure in the fluid or gas being measured. Since this drop in pressure is related to the density and flow velocity of the fluid or gas being measured, comparing the difference in pressure upstream and downstream from the constriction makes it possible for pressure sensors to measure flow rates.


  1. High precision measurement
    The D6F-PH features a new digital correction algorithm that achieves 3% RD precision, contributing to optimization of control efficiency.
  2. High flow impedance to reduce the influence of bypass configuration
    By increasing the sensor's flow resistance, the influence of bypass pipe length and diameter has been reduced, leading to more stable measurement.
  3. Reduced size increases installation flexibility
    The sensor's dimensions were reduced to 26mm x 22mm x 18mm thanks to a new flow channel design that makes full use of the latest flow analysis technology. The reduction of the circuit board footprint will contribute to the reduction of system sizes.
  4. Anomaly detection
    Sensor element "open," "short circuit," and "power supply voltage" anomaly detection provides greatly enhanced reliability.


Model D6F-PH0025AD1 D6F-PHO505AD3 D6F-PH5050AD3
Measurement range (see note 1) 0 to 250Pa +/-50Pa +/- 500Pa
Calibration gas (see note 2) Air
Port type Barb joint, maximum outside diameter: 4.9mm
Power supply 2.3 to 3.6 VDC
Current consumption 20mA max.
With no load and Vcc of 3.3 VDC, GND=OVDC, 25 degree C
Resolution 12 bit
Zero point toleration +/- 0.2Pa
Span tolerance +/- 3%R.D.
Temperature compensation Yes
Span shift due to temperature variation <+/-0.5% R.D. per 10 degree C
Response time 25ms typical at 12 bit resolution (50ms maximum)
The processing time is 6ms typical at 12 bit resolution
Gas flow through sensor <63mL/min <23mL/min <100mL/min
Interface I2C
Case material PPS
Degree of protection IEC IP40
Withstand pressure 10kPa
Operating temperature -20 to +80 degrees C (with no condensation or icing)
Operating humidity 35% to 80% RH (with no condensation or icing)
Storage temperature -40 to +80 degrees C (with no condensation or icing)
Storage humidity 35% to 80% RH (with no condensation or icing)
Insulation resistance Between sensor outer cover and lead terminals:
20Ω min (500VDC)
Dielectric strength Between sensor outer cover and lead terminals:
500VAC, 50/60Hz min. for 1 minute (leakage current: 1mA max.)
Weight 5.2g
  1. Note 1: At standard atmospheric pressure (1013.25hPa).
  2. Note 2: Dry gas not containing dust, oil, or mist.

Assessment-use demo kit

An optional conversion board and software-based demo kit is available for use in assessing sensor performance and device compatibility.


Open price

Sales target

300 million yen in FY2014

Production plant

Yasu Plant, OMRON Corporation

Sensor exterior


Headquartered in Kyoto, Japan, OMRON Corporation is a global leader in the field of automation. Established in 1933, OMRON has more than 37,000 employees in over 35 countries working to provide products and services to customers in a variety of fields including industrial automation, electronic components, social systems, healthcare, and the environment. The company has regional head offices in Singapore (Asia Pacific), Beijing (Greater China), Amsterdam (Europe, Africa, and the Middle East), Chicago (the Americas), Gurgaon (India), and Sao Paulo (Brazil).
For more information, visit OMRON's website at

Masashige Fukumoto (
Micro Devices Division
Micro Devices HQ
OMRON Corporation
Tel.: +81-7-7588-9200

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