OMRON Releases New, Cyclone-type MEMS Flow Sensor - Highly Dust Resistant, Ideal for Sensing Air Flow in Air Conditioning Equipment -


TOKYO, Japan - OMRON Corporation (TOKYO: 6645, US: OMRNY) has announced the release of a new MEMS flow sensor, the D6F-P, on September 14, 2007. Incorporating a unique cyclone-type Dust Segregation System (DSS), the new flow sensor is ideal for applications which require sensing of non-filtered, 'ordinary' air, such as 24-hour ventilation systems and energy-saving air conditioners for homes and offices. OMRON will exhibit the D6F-P MEMS Flow Sensor at the CEATEC JAPAN 2007 Exhibition, which runs from October 2 (Tuesday) to October 6 (Saturday) at Makuhari Messe International Convention Complex, near Tokyo, Japan. <images>

MEMS flow sensors are particularly sensitive to dust particles. To overcome this drawback, this new product features OMRON-designed 3D flow paths that generate cyclonic flows to separate dust particles from the air using centrifugal and gravitational forces. Unlike conventional sensors that rely on an indirect sensing method, the new D6F-P senses airflow directly and can thus help increase the precision of air conditioning equipment.

Development Background

In recent years, 24-hour ventilation systems, lowering power consumption and environmental protection have become issues of major concern, and this has created a demand for precise measurement and control of the volume of air passing in and out of air conditioning systems. OMRON's new MEMS flow sensor is designed to meet this need for an ultra-small sensor that can detect minute airflow with high sensitivity.

Overview of New Product

This cyclone-type MEMS Flow Sensor features OMRON's unique Dust Segregation System (DSS), which enables it to detect minute flowrates with high sensitivity even in dusty environments. This makes it ideal for flowrate control in air conditioners in homes and offices.

By using the world's smallest class of MEMS flow sensor element, OMRON has succeeded in reducing the new sensor's footprint by 50% compared with previous models, allowing it to be easily built into increasingly smaller consumer products and measuring devices.

In addition, direct mounting to PCBs helps to lower total costs by preventing wiring errors and reducing labor requirements.

Moreover, in contrast to the uni-directional flow sensing of earlier models, the D6F-P offers bi-directional flow sensing for use in applications such as sensing air conditioner intake and exhaust, or human breathing.


  • OMRON's unique cyclonic Dust Segregation System (DSS) provides a high level of reliability by separating dust particles from air to reduce their effect on the sensor chip.
  • Compact (50% smaller footprint than the D6F-01A1).
  • In addition to PCB-mountable models, connector models are also available.
  • Suitable for bi-directional flow sensing.

Other Applications

Measuring devices, medical devices, semiconductor equipment, etc.


Open price

Sales Target

D6F Series: Approx. 10 billion yen in FY2008

Manufacturing Factory


Cyclonic Flow Structure
(Patent-pending Dust Segregation System (DSS))

Cyclonic Flow Structure



Principles of Flow Sensor Measurement

When there is no airflow, the temperature distribution around the heater is symmetrical on the right and left. When an airflow is present, the side of the flow sensor facing the source of the airflow cools and the opposite side warms, disrupting the temperature equilibrium. The difference in temperature appears as a difference in the thermopiles' electromotive force, allowing the mass flow velocity and mass flow rate to be calculated.

Principles of Flow Sensor Measurement

For media related enquiries, please contact:
James Seddon (
Sarah Hall (
at OMRON Corporate Communications Department
Telephone: +81 3 3436 7202

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