The Principle of MEMS Flow Sensor | OMRON Electronic Components Web


		OMRON's proprietary MEMS Flow Sensor chips comprise of Upper insulating membrane and Lower insulating membrane on the Hyperfine Silicon plate of 1.55mm(H)×1.55mm(W)×0.4mm(D) with the heater and the thermopile in the middle, and Ambient Temperature sensor located outside the cavity.

		OMRON has realized world’s smallest and sensitive flow sensor by its MEMS technology. As the MEMS flow sensor detects mass flow rate by measuring the deviations of the heat symmetry of the heater, it is insensitive to temperature or pressure, enabling wide range of gas flow measurements with high accuracy. •Hyperfine structure (1.55mm×1.55mm×0.4mm (W)) •High Sensitivity (Capable of measuring at a flow velocity of 1cm/s or less) •Little influence by pressure and temperature, and quick response.


		When there is no flow around the MEMS flow sensor chip, temperature distribution concentrated around the heater is uniform, but when the flow sensor is subjected to flow, temperature at the side of the heater facing the flow cools, the side away from the flow warms up, and the temperature equilibrium collapses. Because the difference in temperature appears as the difference in the thermopile's electromotive force, the mass flow velocity and mass flow rate can be measured.

		*MEMS(Micro -Electro -Mechanical - Systems) MEMS, abbreviation of Micro Electro Mechanical Systems, is an Integration of various kinds of technology such as processing Semiconductor, machine, and electrical circuit.

Sensors