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Mass Flow Sensor

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D6F- □A1 MEMS Flow Sensor

A Compact, High-accuracy Sensor That Measures Low Flow Rates.

  • High accuracy of ±3 FS.
  • Flow rates can be measured without being
    affected by temperature or voltage.
This web page provides an excerpt from a datasheet.
Refer to Datasheetand other applicable documents for more information.
OrderingInformationRatings / CharacteristicsDimensions
(Please contact to local OMRON representatives for delivery.)
Case material
Applicable Gas
Flow Range
Model
Thermoplastic resin Air* 0-1L/min D6F-01A1-110
0-2L/min D6F-02A1-110
*The fluid must be clean, dry gas, with no dust or oil mist.
OrderingInformationRatings / CharacteristicsDimensions
Absolute maximum rating
Item
Symbol
Rating
Unit
Power Supply Voltage Vcc 26.4 VDC
Output Voltage Vout 6 VDC


Characteristics
Item
Model
number
D6F-01A1-110
D6F-02A1-110
Flow rate 0 to 1L/min (normal)
(See note.)
0 to 2L/min (normal)
(See note.)
Joint shape Barb joint
(Inside diameter: 4 mm, Maximum external diameter:
8.6 mm, Minimum external diameter: 7.4 mm.)
Case material Thermoplastic resin
Operating
conditions
Applicable fluid Air
(The fluid must be clean, dry gas, with no dust or oil mist.)
Max. allowable
pressure
200 kPa
Operating
temperature
−10 to 60°C (with no condensation or icing)
Operating humidity 85% max. (with no condensation or icing)
Storage
temperature
−40 to 80°C (with no condensation or icing)
Storage humidity 85% max. (with no condensation or icing)
Power supply voltage 10.8 to 26.4 VDC
Output signal Analog output, 1 to 5 VDC (non-linear output)
Current consumption Without load: Vcc = 12 to 24 VDC, Vss = 0 V, 25°C, 15 mA max.
Insulation resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Withstand voltage Between Sensor outer cover and lead terminals: 500
VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Note: "L/min (normal)" is the volume flow rate at 0°C and 101.3 kPa.

Connection
D6F-01A1-110
D6F-02A1-110

Pin No. 1: Vcc
  2: Vout
  3: GND
Connectors Molex 51021
Terminals Molex 50079
Wires AWG26 or AWG28

OrderingInformationRatings / CharacteristicsDimensions
  (Unit :mm)

D6F-01A1-110
D6F-02A1-110


Dimensions1
Mounting Hole Dimensions
Lead Wires (Included)
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