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MEMS Flow Sensors

D6F-□A5/□A6
MENS Flow Sensor

High-accuracy Sensing with a CompactBody for 10 to 50 L/min Flow Rates.

  • Accurately detects a mass flow rate of 10 to50 L/min.
  • A compact size of 30 × 78 × 30 mm (D × W × H).

Updated Aug. 31, 2012

This web page provides an excerpt from a datasheet. Refer to Datasheet and other applicable documents for more information.

Case material
Flow Range
Model
0 to 10 L/min D6F-10A5-000 1
D6F-10A6-000
0 to 20 L/min D6F-20A5-000
D6F-20A6-000
0 to 50 L/min D6F-50A5-000
D6F-50A6-000

Cable(Order separately)
Terminal
Wire
Housing
Model
MOLEX-50079 AWG 26 MOLEX-51021 D6F-CABLE1
Absolute maximum rating
Item
Symbol
Rating
Unit
Power Supply Voltage Vcc 26.4 VDC
Output Voltage Vout 6 VDC


Performance
Item
Model number
D6F-10A5-000/ -10A6-000
D6F-20A5-000/ -20A6-000
D6F-50A5-000/ -50A6-000
Flow rate 0 to 10 L/min (normal) (See note.) 0 to 20 L/min (normal) (See note.) 0 to 50 L/min (normal) (See note.)
Ccase material Thermoplastic resin
Operating conditions Applicable fluid Air (The fluid must be clean, dry gas, with no dust or oil mist.)
Max. allowable pressure 500kPa
Operating temperature -10 to 60℃ (with no condensation or icing)
Operating humidity 85% max. (with no condensation or icing)
Storage temperature -30 to 80℃ (with no condensation or icing)
Storage humidity 85% max. (with no condensation or icing)
Power Supply Voltage 10.8 to 26.4 VDC
Output Signal Analog output, 1 to 5 VDC (non-linear output)
Current Consumption Without load: Vcc = 12 to 24 VDC, Vss = 0 V, 25℃, 15 mA max.
Insulation resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Withstand voltage Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Note: "L/min (normal)" is the volume flow rate at 0℃ and 101.3 kPa.

Connection
D6F-03A3-000

  (Unit :mm)

Sensor
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000




  Sensor
D6F-10A6-000
D6F-20A6-000
D6F-30A6-000



Cable (Order Separately)
D6F-CABLE1

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