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OMRON's proprietary MEMS Flow Sensor
chips comprise of Upper insulating membrane and Lower insulating
membrane on the Hyperfine Silicon plate of 1.55mm(H)×1.55mm(W)×0.4mm(D)
with the heater and the thermopile in the middle, and Ambient
Temperature sensor located outside the cavity. |
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OMRON has realized world’s
smallest and sensitive flow sensor by its MEMS technology.
As the MEMS flow sensor detects mass flow rate by measuring
the deviations of the heat symmetry of the heater, it is insensitive
to temperature or pressure, enabling wide range of gas flow
measurements with high accuracy.
•Hyperfine structure (1.55mm×1.55mm×0.4mm (W))
•High Sensitivity (Capable of measuring at a flow velocity of
1cm/s or less)
•Little influence by pressure and temperature, and quick response. |
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When there is no flow around the
MEMS flow sensor chip, temperature distribution concentrated
around the heater is uniform, but when the flow sensor is subjected
to flow, temperature at the side of the heater facing the flow
cools, the side away from the flow warms up, and the temperature
equilibrium collapses. Because the difference in temperature
appears as the difference in the thermopile's electromotive
force, the mass flow velocity and mass flow rate can be measured.
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*MEMS(Micro -Electro -Mechanical - Systems)
MEMS, abbreviation of Micro Electro Mechanical Systems, is an
Integration of various kinds of technology such as processing
Semiconductor, machine, and electrical circuit.
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