MEMS stands for Micro Electro Mechanical Systems.
MEMS is referred to as Micro Machines in the United States and Japan, and Micro System Technology (MST) in Europe.

The Research of MEMS technology has flourished in both Japan and the United States, but two countries have taken quite different approaches.
In the United States, Semiconductor processing Technologies
was an origin for MEMS, whereas miniaturization in mechatronic technology was the key issue for developing MEMS technology in Japan.