| |
|
|
| |
| |
Prototyping
and producing applied products, thin film,
and
micro structure devices with OMRON's Microsensing Technology.
|
| |
|
OMRON'S
MEMS - Examples for Device Applications |
| Technology |
Devices |
| Silicon-Glass
Anodic Bonding |
Sensor ( Accelerometer,
Pressure Sensor, Gyroscopes, etc.) |
Anisotropic
etching of Silicon
|
Microreactor |
| Silicon Optical
Bench |
| Optical waveguide |
| Dry etching of Silicon |
Micro-TAS
(Total Analysis System) |
| Micro Machined Relay |
| Micro Actuator |
| Glass processing |
Electric Capacitive
Sensor |
| Microfluidics |
| Biological Chip |
| Diaphragm processing |
Thermal Sensor |
| Flow Sensor |
|
MEMS process comprise of multiple
technologies with complicated mechanism. For detail information,
refer to local OMRON representatives.
|
|
|
| |
|
|
|
|