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Microfabrication Technorogy for MEMS
Example for Micromachining application
Prototyping and producing applied products, thin film,
and micro structure devices with OMRON's Microsensing Technology
Pressure Sensor,
Accelerometer,
etc.
*MEMS stands for Micro Electro Mechanical Systems
Total Sales : 25,000k pcs.
(1996-2006)
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MEMS Microfabrication Technology
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Depositing Thin film
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Anodic Bonding : Wafer Bonding
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Etching Technology : 3D wet Etching for Wafer
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Deep RIE : 3D Deep dry etching for Wafer
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Sacrificial etching : 3D fabrication by etching Sacrificial layer with high selectivity towards the structural layer.
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etc.
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