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Full Set of Services from Development to Manufacturing |
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OMRON's Minakuchi Factory in Shiga
Pref. has the extensive experience in the field
of MEMS Foundry for volume manufacturing which enables
full set of services from development to manufacturing,
and has shipped 25,000k pieces of MEMS products
in total by 2006.
In addition, our new foundry, Omron
Semiconductors Co.,Ltd. (incorporated in April,
2007 in Yasu, Shiga Pref.) possesses Japan's first
mass production line for 8 inches.
We have variety of services to meet the customer's
requirements from 4-5 inches wafer (with our conventional
factory) to 8 inches. |
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| Metal Deposition Area |
Bonding Area |
Photolithography room |
| Floor space : 600sqm |
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Bulk/Surface Micromachining technology and Facilities |
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In addition to the common processes of
manufacturing semiconductors - Bipolar Si Line, CMOS Line,
OMRON offers MEMS technology and factory for Bulk
Micromachining, such as Anodic
Bonding, ECE, Deep
RIE, and lines for Glass only, which differentiate
from the conventional processes.
OMRON has long time experience in volume production for
Anodic Bonding and ECE.
Moreover, as we have the technology and facilities for
Surface Micromachining,
we can develop and prototype devices with Surface MEMS
processing and monolithic MEMS processing. |
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Enabling
small-lot prototyping, mass production, partial processing
, and total processing |
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| Development
Phase of Customer |
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New Device
for Laser Dicing |
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Leading edge technology for dicing
breakable wafer.
Please contact to local OMRON representatives for inquiries.
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